Generating 3D Models of MEMS Devices by Process Emulation

TitleGenerating 3D Models of MEMS Devices by Process Emulation
Publication TypeReports
Year of Publication2002
AuthorsBellam S, Gupta SK, Priyadarshi AK
Date Published2002///
InstitutionInstitute for Systems Research, University of Maryland, College Park
KeywordsNext-Generation Product Realization Systems

MEMS designers often use numerical simulation for detecting errors in the mask layout. Numerical simulation involves generating 3D models of MEMS device from the mask layout and process description. The generated models can be meshed and simulated over different domains. This report describes an efficient algorithm that can generate 3D geometric models of MEMS devices. Specifically, the algorithm emulates the manufacturing of a single functional polysilicon layer MEMS devices using the MUMPSprocess.