@article {18862,
	title = {Nano-to-millimeter scale integrated systems},
	journal = {Components and Packaging Technologies, IEEE Transactions on},
	volume = {22},
	year = {1999},
	month = {1999/06//},
	pages = {338 - 343},
	abstract = {Over the last several years various industries have been developing nano, micro, and millimeter scale technologies, which have resulted in components ranging from quantum transistors, to widely commercialized integrated circuits, to microelectromechanical sensors. A common emphasis of these fabrication industries has been on the integration of different functions in miniaturized systems; however, the technology currently used to realize these systems is monolithic. A unique class of hybrid technology systems is Integrated nano to millimeter (In2m) systems. An In2m system typically has components spanning multiple sizes, diverse technology domains, and mixtures of electrical, mechanical, thermal, chemical, fluidic, and biological functions},
	keywords = {fabrication technology, In2m, integrated nano to millimeter system, micromechanical devices, nanotechnology},
	isbn = {1521-3331},
	doi = {10.1109/6144.774758},
	author = {Last,H.R. and Deeds,M. and Garvick,D. and Kavetsky,R. and Sandborn,P. A. and Magrab,E. B. and Gupta,S.K.}
}
