@conference {18810,
	title = {A Two Degree of Freedom Nanopositioner With Electrothermal Actuator for Decoupled Motion},
	year = {2011},
	month = {2011///},
	pages = {447 - 457},
	publisher = {ASME},
	organization = {ASME},
	abstract = {Building a two degree-of-freedom (2 DOF) MEMS nanopositioner with decoupled X-Y motion has been a challenge in nanopositioner design. In this paper a novel design concept on making the decoupled motion of the MEMS nanopositioner is suggested. The suggested nanopositioner has two electrothermal actuators and employs a fully nested motion platform with suspended anchors. The suggested MEMS nanopositioner is capable of delivering displacement from the electrothermal actuator to the motion platform without coupled motion between the two X-Y axes. The design concept, finite element analysis (FEA) results, fabrication procedures and the performance of the 2 DOF nanopositioner is presented. In order to test the nanopositioner moving platform decoupled motion, one actuator moves the platform by 60 {\textmu}m, while the other actuator is kept at the same position. The platform position cross talk error was measured to be less than 1 {\textmu}m standard deviation.},
	isbn = {978-0-7918-5484-6},
	doi = {10.1115/DETC2011-48619},
	url = {http://link.aip.org/link/ASMECP/v2011/i54846/p447/s1\&Agg=doi},
	author = {Kim,Yong-Sik and Dagalakis,Nicholas G. and Gupta, Satyandra K.}
}
