TY - CONF T1 - Energy loss in MEMS resonators and the impact on inertial and RF devices Y1 - 2009 A1 - Weinberg,M. A1 - Candler,R. A1 - Chandorkar,S. A1 - Varsanik,J. A1 - Kenny,T. A1 - Duwel,A. KW - energy loss KW - gyroscopes KW - inertial devices KW - MEMS gyros KW - MEMS resonators KW - micromachined devices KW - micromechanical resonators KW - NEMS devices KW - Q-factor KW - quality factor KW - radiofrequency applications KW - RF devices AB - In this paper, we review the current understanding of energy loss mechanisms in micromachined (MEMS and NEMS) devices. We describe the importance of high quality factor (Q) to the performance of MEMS gyros and MEMS resonators used in radio-frequency applications. M3 - 10.1109/SENSOR.2009.5285418 ER -