@conference {18941,
	title = {Energy loss in MEMS resonators and the impact on inertial and RF devices},
	year = {2009},
	month = {2009/06//},
	pages = {688 - 695},
	abstract = {In this paper, we review the current understanding of energy loss mechanisms in micromachined (MEMS and NEMS) devices. We describe the importance of high quality factor (Q) to the performance of MEMS gyros and MEMS resonators used in radio-frequency applications.},
	keywords = {energy loss, gyroscopes, inertial devices, MEMS gyros, MEMS resonators, micromachined devices, micromechanical resonators, NEMS devices, Q-factor, quality factor, radiofrequency applications, RF devices},
	doi = {10.1109/SENSOR.2009.5285418},
	author = {Weinberg,M. and Candler,R. and Chandorkar,S. and Varsanik,J. and Kenny,T. and Duwel,A.}
}
